Device and method for the measurement of anchor shear strength in MEMS devices

De Coster, JeroenJeroenDe CosterPicco, AndreaAndreaPiccoDe Wolf, IngridIngridDe Wolf2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20531Device and method for the measurement of anchor shear strength in MEMS devicesProceedings paper