Vanhellemont, JanJanVanhellemontDornberger, E.E.DornbergerEsfandyari, J.J.EsfandyariKissinger, G.G.KissingerTrauwaert, Marie-AstridMarie-AstridTrauwaertBender, HugoHugoBenderGräf, D.D.GräfLambert, U.U.Lambertvon Ammon, W.W.von Ammon2021-09-302021-09-301997https://imec-publications.be/handle/20.500.12860/2270Defects in As-grown silicon and their evolution during heat treatmentsProceedings paper