Process and material requirements for successful heterogonous passive component integration in RF system

Beyne, EricEricBeyneDe Raedt, WalterWalterDe RaedtCarchon, GeertGeertCarchonSoussan, PhilippePhilippeSoussan2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/11739Process and material requirements for successful heterogonous passive component integration in RF systemProceedings paper