Investigation on the drying dynamics of millimetric water droplets: source of watermarks on silicon wafers

Belmiloud, NaserNaserBelmiloudTamaddon, Amir-HosseinAmir-HosseinTamaddonMertens, PaulPaulMertensXu, XiuMeiXiuMeiXuStruyf, HerbertHerbertStruyf2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/18545Investigation on the drying dynamics of millimetric water droplets: source of watermarks on silicon wafersProceedings paper