De Wolf, PeterPeterDe WolfClarysse, TrudoTrudoClarysseVandervorst, WilfriedWilfriedVandervorstHellemans, L.L.Hellemans2021-09-302021-09-301997https://imec-publications.be/handle/20.500.12860/1832Low weight spreading resistance profiling of ultra-shallow dopant profilesProceedings paper