Ramesh, AnishaAnishaRameshGrowden, TylerTylerGrowdenBerger, Paul R.Paul R.BergerLoo, RogerRogerLooVandervorst, WilfriedWilfriedVandervorstDouhard, BastienBastienDouhardCaymax, MattyMattyCaymax2021-10-202021-10-202012-030018-9383https://imec-publications.be/handle/20.500.12860/21377Boron delta-doping dependence on Si/SiGe resonant interband tunneling diodes grown by chemical vapor depositionJournal article