Critical properties of nanoporous low dielectric constant films revealed by Brillouin light scattering and surface acoustic wave spectroscopy

Flannery, C. M.C. M.FlanneryWittkowski, T.T.WittkowskiJung, K.K.JungHillebrands, B.B.HillebrandsBaklanov, MikhaïlMikhaïlBaklanov2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6324Critical properties of nanoporous low dielectric constant films revealed by Brillouin light scattering and surface acoustic wave spectroscopyJournal article