Plasma-assisted atomic layer deposition of thin film Li2CO3 for all-solid-state Li-Ion batteries

Hornsveld, NorahNorahHornsveldPut, BrechtBrechtPutKessels, ErwinErwinKesselsVereecken, PhilippePhilippeVereeckenCreatore, MariadrianaMariadrianaCreatore2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26736Plasma-assisted atomic layer deposition of thin film Li2CO3 for all-solid-state Li-Ion batteriesMeeting abstracthttp://ma.ecsdl.org/content/MA2016-02/28/1861.abstract