Skeren, TomasTomasSkerenTemst, KristiaanKristiaanTemstVandervorst, WilfriedWilfriedVandervorstVantomme, AndreAndreVantomme2021-10-212021-10-2120131367-2630https://imec-publications.be/handle/20.500.12860/23099Ion-induced roughening and ripple formation on polycrystalline metallic filmsJournal articlehttp://iopscience.iop.org/1367-2630/15/9/093047