In-line metrology for atomic resolution local height variation

Kim, Tae-GonTae-GonKimKim, Soon-WookSoon-WookKimVandeweyer, TomTomVandeweyerJo, Ah-jinAh-jinJoLee, Ju SukJu SukLeeAhn, Byoung-WoonByoung-WoonAhnZandiatashbar, ArdavanArdavanZandiatashbarCho, Sang-JoonSang-JoonChoPark, Sang-ilSang-ilParkIrmer, BerndBerndIrmerSchmidt, SebastianSebastianSchmidt2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28686In-line metrology for atomic resolution local height variationProceedings paperhttp://ieeexplore.ieee.org/document/7969242/