Liu, LiuLiuLiuVan Campenhout, J.J.Van CampenhoutRoelkens, GuntherGuntherRoelkensVan Thourhout, DriesDriesVan ThourhoutBaets, RoelRoelBaets2021-10-172021-10-172008-11https://imec-publications.be/handle/20.500.12860/14052IIIV/SOI heterogeneous integration of optoelectronic devicesProceedings paper