Bearda, TwanTwanBeardaMertens, PaulPaulMertensHeyns, MarcMarcHeynsWallinga, H.H.WallingaWoerlee, P.P.Woerlee2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4099Breakdown and recovery of thin gate oxidesJournal article