Controlled deposition of organic contamination and removal with ozone-based cleaning

Claes, M.M.ClaesDe Gendt, StefanStefanDe GendtKenens, ConnyConnyKenensConard, ThierryThierryConardBender, HugoHugoBenderStorm, WolfgangWolfgangStormBauer, T.T.BauerMertens, PaulPaulMertensHeyns, MarcMarcHeyns2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5143Controlled deposition of organic contamination and removal with ozone-based cleaningJournal article