Celano, UmbertoUmbertoCelanoHantschel, ThomasThomasHantschelBoehme, ThijsThijsBoehmeKanniainen, A.A.KanniainenWouters, LennaertLennaertWoutersBender, HugoHugoBenderBosman, NielsNielsBosmanDrijbooms, ChrisChrisDrijboomsFolkersma, StevenStevenFolkersmaParedis, KristofKristofParedisVandervorst, WilfriedWilfriedVandervorstvan der Heide, PaulPaulvan der Heide2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/32667Reverse tip sample scanning for precise and high-throughput electrical characterization of advanced nodesProceedings paper