Experimental determination of the maximum post-process annealing temperature for standard CMOS wafers

Sedky, SherifSherifSedkyWitvrouw, AnnAnnWitvrouwBender, HugoHugoBenderBaert, KrisKrisBaert2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5642Experimental determination of the maximum post-process annealing temperature for standard CMOS wafersJournal article