Drying of high aspect ratio structures: a comparison of drying techniques via electrical stiction analysis

Pacco, AntoineAntoinePaccoBearda, TwanTwanBeardaMertens, PaulPaulMertensWada, MasayukiMasayukiWada2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14262Drying of high aspect ratio structures: a comparison of drying techniques via electrical stiction analysisMeeting abstract