De Coster, JeroenJeroenDe CosterTilmans, HarrieHarrieTilmansSteeneken, P.G.P.G.SteenekenPuers, BobBobPuers2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10292The influence of gas damping on the harmonic and transient response of MEMS devicesProceedings paper