Stress management techniques for GaN growth on 200mm silicon wafers for High power applications

Kandaswamy, Prem KumarPrem KumarKandaswamyLiang, HuHuLiangNovak, TomasTomasNovakZhao, MingMingZhaoSaripalli, YogaYogaSaripalli2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25454Stress management techniques for GaN growth on 200mm silicon wafers for High power applicationsProceedings paper