Improvement of TANOS NAND Flash performance by the optimazation of a sealing layer

Breuil, LaurentLaurentBreuilFurnemont, ArnaudArnaudFurnemontRothschild, AudeAudeRothschildVan den Bosch, GeertGeertVan den BoschCacciato, AntonioAntonioCacciatoVan Houdt, JanJanVan Houdt2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13450Improvement of TANOS NAND Flash performance by the optimazation of a sealing layerProceedings paper