Vertically coupled InP microring resonators fabricated with BCB waferbonding

Christiaens, IlseIlseChristiaensVan Thourhout, DriesDriesVan ThourhoutBaets, RoelRoelBaets2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/8685Vertically coupled InP microring resonators fabricated with BCB waferbondingProceedings paper