Mortet, V.V.MortetElmazria, O.O.ElmazriaNesladek, MilosMilosNesladekElhakiki, M.M.ElhakikiVanhoyland, G.G.VanhoylandD'Haen, JanJanD'HaenD'Olieslaeger, MarcMarcD'OlieslaegerAlnot, P.P.Alnot2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7914Structural characterisations of AlN/diamond structures used for surface acoustic wave device applicationsJournal article