Fsec laser solid interactions on nanoscale semiconducting objects and their impact on imaging with 3D-atomic resolution in the atomprobe

Innocenti, NicolasNicolasInnocentiKoelling, SebastianSebastianKoellingVandervorst, WilfriedWilfriedVandervorstVanderheyden, BenoitBenoitVanderheyden2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19107Fsec laser solid interactions on nanoscale semiconducting objects and their impact on imaging with 3D-atomic resolution in the atomprobeOral presentation