Sioncke, SonjaSonjaSionckeLux, MarcelMarcelLuxFyen, WimWimFyenMeuris, MarcMarcMeurisTheuwis, A.A.Theuwis2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14488Particle deposition and removal from Ge wafersProceedings paper