De Los Santos, HectorHectorDe Los SantosFischer, GeorgGeorgFischerTilmans, HarrieHarrieTilmansvan Beek, Joost T.M.Joost T.M.van Beek2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/8771RF MEMS for ubiquitous wireless connectivity. Part 1: FabricationJournal article