Gielis, SvenSvenGielisvan der Veen, MarleenMarleenvan der VeenDe Gendt, StefanStefanDe GendtVereecken, PhilippePhilippeVereecken2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/18957Silver-assisted etching of silicon nanowiresProceedings paperhttp://dx.doi.org/10.1149/1.3551490