Integration of a 2D periodic nanopattern into thin-film polycrystalline silicon solar cells by nanoimprint lithography

Abdo, IslamIslamAbdoTrompoukis, ChristosChristosTrompoukisDeckers, JanJanDeckersDepauw, ValerieValerieDepauwTous, LoicLoicTousVan Gestel, DriesDriesVan GestelGuindi, RafikRafikGuindiGordon, IvanIvanGordonEl Daif, OunsiOunsiEl Daif2021-10-222021-10-2220142156-3381https://imec-publications.be/handle/20.500.12860/23461Integration of a 2D periodic nanopattern into thin-film polycrystalline silicon solar cells by nanoimprint lithographyJournal articlehttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=6868226&contentType=Journals+%26+Magazines