Characterization and implementation of thermal ALD AL2O3 as surface passivation for industrial solar cells

Vermang, BartBartVermangLoozen, XavierXavierLoozenJohn, JoachimJoachimJohnVan Kerschaver, EmmanuelEmmanuelVan KerschaverPoortmans, JefJefPoortmansMertens, RobertRobertMertens2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16486Characterization and implementation of thermal ALD AL2O3 as surface passivation for industrial solar cellsMeeting abstract