Non-destructive determination of pore size distribution of low-k porous SOG films

Baklanov, MikhaïlMikhaïlBaklanovKondoh, EiichiEiichiKondohGidley, D.D.GidleyLin, E.E.LinWu, WenWenWuArao, H.H.AraoMogilnikov, K. P.K. P.MogilnikovShamiryan, DenisDenisShamiryanNakashima, A.A.Nakashima2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4088Non-destructive determination of pore size distribution of low-k porous SOG filmsOral presentation