Billen, MargoMargoBillenGao, HangHangGaoGijsenbergh, PieterPieterGijsenberghMarigó, EloiEloiMarigóBinti Roslan, ShazwaniShazwaniBinti RoslanHalbach, AlexandreAlexandreHalbachBarniol, NuriaNuriaBarniolMazzalai, AndreaAndreaMazzalaiSoundara-Pandian, MohanMohanSoundara-PandianHelin, PhilippePhilippeHelinRochus, VeroniqueVeroniqueRochus2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/32551Performance of CMOS-compatible Scandium AIN PMUT for imaging applicationsMeeting abstracthttps://conf.papercept.net/conferences/conferences/ISAF19/program/ISAF19_ContentListWeb_3.html