Contact hole CD uniformity repair through directed self-assembly of cylindrical phase block copolymers

Gronheid, RoelRoelGronheidSingh, ArjunArjunSinghChan, BTBTChanRincon Delgadillo, PaulinaPaulinaRincon DelgadilloNealey, PaulPaulNealeyYounkin, ToddToddYounkinRomo Negreira, AinhoaAinhoaRomo NegreiraSomervell, MarkMarkSomervellTahara, ShigeruShigeruTaharaNafus, KathleenKathleenNafus2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20758Contact hole CD uniformity repair through directed self-assembly of cylindrical phase block copolymersOral presentation