Combined effect of high temperature annealing and hydrogenation of a deposited silicon oxide for silicon surface passivation

Loozen, XavierXavierLoozenJivanescu, M.M.JivanescuStesmans, AndreAndreStesmansChoulat, PatrickPatrickChoulatJohn, JoachimJoachimJohnConard, ThierryThierryConardFranquet, AlexisAlexisFranquetBeaucarne, GuyGuyBeaucarneVan Kerschaver, EmmanuelEmmanuelVan Kerschaver2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/15746Combined effect of high temperature annealing and hydrogenation of a deposited silicon oxide for silicon surface passivationProceedings paper