Plasma etch chamber wall deposits – impact on etch species density and evaluation of cleaning procedures

Dictus, DriesDriesDictusShamiryan, DenisDenisShamiryanParaschiv, VasileVasileParaschivBaklanov, MikhaïlMikhaïlBaklanovBoullart, WernerWernerBoullartDe Gendt, StefanStefanDe GendtVinckier, ChrisChrisVinckier2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15238Plasma etch chamber wall deposits – impact on etch species density and evaluation of cleaning proceduresMeeting abstract