Majeed, BivraghBivraghMajeedTutunjyan, NinaNinaTutunjyanFiorini, PaoloPaoloFioriniSabuncuoglu Tezcan, DenizDenizSabuncuoglu Tezcan2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21080Process integration solution for damage-free bevel for deep Si etch applicationsProceedings paper