Proposal for an integrated silicon-photonics terahertz gas detector using photoacoustics

Verstuyft, MattiMattiVerstuyftAkiki, EliasEliasAkikiWalter, BenjaminBenjaminWalterFaucher, MarcMarcFaucherLampin, Jean-FrancoisJean-FrancoisLampinVan Wolleghem, MathiasMathiasVan WolleghemKuyken, BartBartKuyken2021-10-292021-10-292020-071094-4087https://imec-publications.be/handle/20.500.12860/36270Proposal for an integrated silicon-photonics terahertz gas detector using photoacousticsJournal articlehttps://doi.org/10.1364/OE.397272