AlN/AlGaN/GaN wafer optimization on silicon (111): bow and crystal quality control for Si-CMOS fabs

Kandaswamy, Prem KumarPrem KumarKandaswamyLiang, HuHuLiangZhao, MingMingZhaoSaripalli, YogaYogaSaripalliPorter Carlson, EricEricPorter CarlsonThapa, Sarad BahadurSarad BahadurThapaVan Hove, MarleenMarleenVan HoveRichard, OlivierOlivierRichardDe Vos, BrechtBrechtDe VosVancoille, EricEricVancoilleDutta, BarundebBarundebDutta2021-10-222021-10-2220141610-1634https://imec-publications.be/handle/20.500.12860/24029AlN/AlGaN/GaN wafer optimization on silicon (111): bow and crystal quality control for Si-CMOS fabsJournal articlehttp://onlinelibrary.wiley.com/doi/10.1002/pssc.201300524/abstract