Barnes, J.P.J.P.BarnesGrenier, A.A.GrenierMouton, I.I.MoutonBarraud, SSBarraudAudoit, G.G.AudoitBogdanowicz, JanuszJanuszBogdanowiczFleischmann, ClaudiaClaudiaFleischmannMelkonyan, DavitDavitMelkonyanVandervorst, WilfriedWilfriedVandervorstDuguay, S.S.DuguayRoland, N.N.RolandVurpillot, FFVurpillotBlavette, DDBlavette2021-10-252021-10-2520181359-6462https://imec-publications.be/handle/20.500.12860/30208Atom probe tomography for advanced nanoelectronic devices: current status and perspectivesJournal articlehttp://www.sciencedirect.com/science/article/pii/S1359646217302440