Heremans, PaulPaulHeremansGenoe, JanJanGenoeKuijk, MaartenMaartenKuijkVounckx, RogerRogerVounckxBorghs, GustaafGustaafBorghs2021-09-302021-09-301997https://imec-publications.be/handle/20.500.12860/1927Mushroom microlenses: optimized microlenses by reflow of multiple layers of photoresistJournal article