Statistical analysis of the influence of thinning processes on the strength of silicon

Yang, YuYuYangCotrin Teixeira, RicardoRicardoCotrin TeixeiraRoussel, PhilippePhilippeRousselSwinnen, BartBartSwinnenVerlinden, BertBertVerlindenDe Wolf, IngridIngridDe Wolf2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16574Statistical analysis of the influence of thinning processes on the strength of siliconProceedings paper