EUV flare and proximity modeling and model-based correction

Zuniga, Christian D.Christian D.ZunigaHabib, MohamedMohamedHabibWord, James C.James C.WordLorusso, GianGianLorussoHendrickx, EricEricHendrickxBaylav, BurakBurakBaylavChalasani, RaghuRaghuChalasaniLam, MichaelMichaelLam2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/20241EUV flare and proximity modeling and model-based correctionProceedings paper