Local Electric Field-Aware 3D TDDB model for BEOL reliability predictions

Fang, YuYuFangLesniewska, AlicjaAlicjaLesniewskaCiofi, IvanIvanCiofiRoussel, PhilippePhilippeRousselDe Wolf, IngridIngridDe WolfCroes, KristofKristofCroes2025-12-102025-12-102025-01-01979-8-3315-0478-61541-7026https://imec-publications.be/handle/20.500.12860/58532engLocal Electric Field-Aware 3D TDDB model for BEOL reliability predictionsProceedings paper10.1109/IRPS48204.2025.10982953WOS:001546466200046