Atomic layer processing of 2D materials for beyond CMOS applications

Delabie, AnneliesAnneliesDelabieCaymax, MattyMattyCaymaxGroven, BenjaminBenjaminGrovenHeyne, MarkusMarkusHeyneZhang, HaodongHaodongZhangChiappe, DanieleDanieleChiappeHeyns, MarcMarcHeynsRadu, IulianaIulianaRadu2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26530Atomic layer processing of 2D materials for beyond CMOS applicationsMeeting abstract