Marsik, P.P.MarsikVerdonck, PatrickPatrickVerdonckDe Roest, DavidDavidDe RoestBaklanov, MikhaïlMikhaïlBaklanov2021-10-182021-10-1820100040-6090https://imec-publications.be/handle/20.500.12860/17590Porogen residues detection in optical properties of low-k dielectrics cured by ultraviolet radiationJournal article