Smith, BruceBruceSmithVandenberghe, GeertGeertVandenbergheMartin, P. W.P. W.MartinRack, P.P.RackHsu, S.S.HsuChen, F.F.Chen2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5667Gray bar masking: fabrication and imaging for 193 nmOral presentation