Can we increase the efficiency of organic contamination removal by ozone/Di-water processes by using additives?

De Smedt, FrankFrankDe SmedtVankerckhoven, H.H.VankerckhovenDe Gendt, StefanStefanDe GendtHeyns, MarcMarcHeynsVinckier, ChrisChrisVinckier2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7446Can we increase the efficiency of organic contamination removal by ozone/Di-water processes by using additives?Proceedings paper