Bargallo Gonzalez, MireiaMireiaBargallo GonzalezChowdhury, Mohammad KamruzzamanMohammad KamruzzamanChowdhuryBhouri, NadaNadaBhouriVerheyen, PeterPeterVerheyenLeys, FrederikFrederikLeysRichard, OlivierOlivierRichardLoo, RogerRogerLooClaeys, CorCorClaeysSimoen, EddyEddySimoenMachkaoutsan, VladimirVladimirMachkaoutsanTomasini, P.P.TomasiniThomas, S.G.S.G.ThomasLu, J.P.J.P.LuWeijtmans, J.W.J.W.WeijtmansWise, R.R.Wise2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/11697Relaxation induced excess leakage current in recessed Si1-xGex source/drain junctionsProceedings paper