Van Acoleyen, KarelKarelVan AcoleyenRoels, JorisJorisRoelsClaes, TomTomClaesVan Thourhout, DriesDriesVan ThourhoutBaets, RoelRoelBaets2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19944NEMS-based optical phase modulator fabricated on silicon-on-insulatorProceedings paper