Geudens, ViktorViktorGeudensVan Steenberge, GeertGeertVan SteenbergeMissinne, JeroenJeroenMissinne2024-11-262024-09-292024-11-2620241530-437XWOS:001285340000094https://imec-publications.be/handle/20.500.12860/44585Temperature Compensated Differential Pressure Sensor Based on a Glass Membrane With Femtosecond Laser Written Bragg GratingsJournal article10.1109/JSEN.2024.3411096WOS:001285340000094