Popovici, Mihaela IoanaMihaela IoanaPopoviciVan Elshocht, SvenSvenVan ElshochtMenou, NicolasNicolasMenouFavia, PaolaPaolaFaviaBender, HugoHugoBenderRosseel, ErikErikRosseelSwerts, JohanJohanSwertsAdelmann, ChristophChristophAdelmannVrancken, ChristaChristaVranckenMoussa, AlainAlainMoussaTielens, HildeHildeTielensTomida, KazuyukiKazuyukiTomidaPawlak, MalgorzataMalgorzataPawlakKaczer, BenBenKaczerSchoofs, GeertGeertSchoofsVandervorst, WilfriedWilfriedVandervorstWouters, DirkDirkWoutersKittl, JorgeJorgeKittl2021-10-192021-10-1920111071-1023https://imec-publications.be/handle/20.500.12860/19603Impact of thermal treatment upon morphology and crystallinity of strontium titanate films deposited by atomic layer depositionJournal article10.1116/1.3534018http://avspublications.org/jvstb/resource/1/jvtbd9/v29/i1/p01A304_s1