Low-loss waveguides and passive devices in BCB-bonded InP membranes on silicon

Bordas, F.F.BordasVan Laere, FrederikFrederikVan LaereRoelkens, GuntherGuntherRoelkensGeluk, E.J.E.J.GelukKarouta, F.F.Karoutavan Veldhoven, P.J.P.J.van VeldhovenNötzel, R.R.NötzelVan Thourhout, DriesDriesVan ThourhoutBaets, RoelRoelBaetsSmit, M.K.M.K.Smit2021-10-172021-10-172008-11https://imec-publications.be/handle/20.500.12860/13418Low-loss waveguides and passive devices in BCB-bonded InP membranes on siliconProceedings paper