Integration of resistive switching NiO in small via structures from localized oxidation in nickel metallic layer

Courtade, LoreneLoreneCourtadeTurquat, Ch.Ch.TurquatLisoni, JuditJuditLisoniGoux, LudovicLudovicGouxWouters, DirkDirkWoutersDeleruyelle, C.C.DeleruyelleMuller, Ch.Ch.Muller2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13565Integration of resistive switching NiO in small via structures from localized oxidation in nickel metallic layerProceedings paper